This is log MKS Tinybee whith grbHAL 230828 and H100 VFD driver.

My inverter is G-PENNY H100-2.252-1B
manual to https://community.carbide3d.com/uploads/short-url/xtTUvnET1LPfu7W4Q2ApmubyPNX.pdf

The VFD setting is
JP4=on
F002=2
F003=2
F163=1
F164=2
F164=0
F169=0

For send command I use IOSENDER 2.0.42.
The commands analyzed is M3 S7200, M3 S1000, M4 S7200, M5, M4 S10000.
I read directly the Modbus whith RS485 adapter and Serial Port Monitor.
---------------------------------------------------------------------------------- 

 
>>>>(send M3 S7200)
---------------------------------------------------------------------------------- 
[14/09/2023 17:00:29] 
Modbus Response (COM11) 
Address: 1 
Function: 5 (0x05) - Write Single Coil 
    Address: 73 
    Value: 65280 
Checksum: 0x5dec - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 17:00:29] 
Modbus Response (COM11) 
Address: 1 
Function: 6 (0x06) - Write Single Register 
    Address: 512 <<<<<<<<<<<<<<<<< (not is 513)
    Value: 1202 
Checksum: 0x0ac7 - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 17:00:30] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 00 00 00 32  
        Register0: 0 
        Register1: 50 <<<<<<<<<<<<<<<<<<< (always locked to 50)
Checksum: 0x7a51 - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 17:00:30] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 00 8f 00 32  
        Register0: 143 
        Register1: 50 
Checksum: 0x4bba - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 17:00:30] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 02 0d 00 32  
        Register0: 525 
        Register1: 50 
Checksum: 0xea2a - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 17:00:31] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 04 4b 00 32  
        Register0: 1099 
        Register1: 50 
Checksum: 0x0b77 - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 17:00:32] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 04 b0 00 32  
        Register0: 1200 
        Register1: 50 
Checksum: 0x7a86 - OK 
---------------------------------------------------------------------------------- 

>>>>(send M3 S10000)
---------------------------------------------------------------------------------- 
[14/09/2023 17:21:16] 
Modbus Response (COM11) 
Address: 1 
Function: 5 (0x05) - Write Single Coil 
    Address: 73 
    Value: 65280 
Checksum: 0x5dec - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 17:21:16] 
Modbus Response (COM11) 
Address: 1 
Function: 6 (0x06) - Write Single Register 
    Address: 512 <<<<<<<<<<<<<<<<< (not is 513)
    Value: 1670 
Checksum: 0x0a70 - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 17:21:16] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 00 73 00 32  
        Register0: 115 
        Register1: 50 <<<<<<<<<<<<<<<<<<< (always locked to 50)
Checksum: 0x8b8a - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 17:21:17] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 02 af 00 32  
        Register0: 687 
        Register1: 50 
Checksum: 0x4bc8 - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 17:21:18] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 04 b0 00 32  
        Register0: 1200 
        Register1: 50 
Checksum: 0x7a86 - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 17:21:22] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 04 b0 00 32  
        Register0: 1200 
        Register1: 50 
Checksum: 0x7a86 - OK 
---------------------------------------------------------------------------------- 

>>>>(send M4 S7200)
---------------------------------------------------------------------------------- 
[14/09/2023 17:40:22] 
Modbus Response (COM11) 
Address: 1 
Function: 5 (0x05) - Write Single Coil 
    Address: 74 
    Value: 65280 
Checksum: 0xadec - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 17:40:22] 
Modbus Response (COM11) 
Address: 1 
Function: 6 (0x06) - Write Single Register 
    Address: 512 
    Value: 1202 
Checksum: 0x0ac7 - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 17:40:22] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 00 00 00 32  
        Register0: 0 
        Register1: 50 
Checksum: 0x7a51 - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 17:40:22] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 0 
    Values:  
Checksum: 0x71cb - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 17:40:22] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 00 6e 00 32  
        Register0: 110 
        Register1: 50 
Checksum: 0x1b8c - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 17:40:23] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 01 ea 00 32  
        Register0: 490 
        Register1: 50 
Checksum: 0x5a59 - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 17:40:24] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 04 b0 00 32  
        Register0: 1200 
        Register1: 50 
Checksum: 0x7a86 - OK 
---------------------------------------------------------------------------------- 

>>>>(send M5) <<<<<<<<<<<<<<<<<<<<<
(in most cases it doesn't work for stopped send M3 S0 or M3 S0 before M5)
---------------------------------------------------------------------------------- 
[14/09/2023 18:26:04] 
Modbus Response (COM11) 
Address: 1 
Function: 5 (0x05) - Write Single Coil 
    Address: 75 
    Value: 65280 
Checksum: 0xfc2c - OK 
----------------------------------------------------------------------------------
[14/09/2023 18:26:04] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 04 b0 04 af  
        Register0: 1200 
        Register1: 1199 
Checksum: 0xb9ef - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 18:26:05] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 04 22 04 af  
        Register0: 1058 
        Register1: 1199 
Checksum: 0x1802 - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 18:26:06] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 01 26 04 af  
        Register0: 294 
        Register1: 1199 
Checksum: 0x590f - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 18:26:06] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 00 00 04 af  
        Register0: 0 
        Register1: 1199 
Checksum: 0xb938 - OK 
---------------------------------------------------------------------------------- 

>>>>(send M4 S10000)
---------------------------------------------------------------------------------- 
[14/09/2023 18:32:13] 
Modbus Response (COM11) 
Address: 1 
Function: 5 (0x05) - Write Single Coil 
    Address: 74 
    Value: 65280 
Checksum: 0xadec - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 18:32:13] 
Modbus Response (COM11) 
Address: 1 
Function: 6 (0x06) - Write Single Register 
    Address: 512 
    Value: 1670 
Checksum: 0x0a70 - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 18:32:13] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 00 b9 00 32  
        Register0: 185 
        Register1: 50 
Checksum: 0xabb4 - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 18:32:14] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 01 78 00 32  
        Register0: 376 
        Register1: 50 
Checksum: 0xfbb4 - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 18:32:14] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 02 f6 00 32  
        Register0: 758 
        Register1: 50 
Checksum: 0x9bdb - OK 
---------------------------------------------------------------------------------- 
[14/09/2023 18:32:15] 
Modbus Response (COM11) 
Address: 1 
Function: 4 (0x04) - Read Input Registers 
    Byte Count: 4 
    Values: 04 b0 00 32  
        Register0: 1200 
        Register1: 50 
Checksum: 0x7a86 - OK 
----------------------------------------------------------------------------------